Sputter carbon and e beam coater Leica EM ACE 600
The EM ACE600 sputter coater is a versatile high vacuum film deposition instrument for your FE-SEM and TEM applications.
Whether you need to
- enhance contrast by a fine-grained metal layer,
- produce nanometer thin but robust carbon films,
- rotary shadow your sample to make smallest features visible, or to
- move into cryo-coating
Description
The EM ACE600 sputter coater is a versatile high vacuum film deposition instrument for your FE-SEM and TEM applications.
Whether you need to
- enhance contrast by a fine-grained metal layer,
- produce nanometer thin but robust carbon films,
- rotary shadow your sample to make smallest features visible, or to
- move into cryo-coating
Application
Carbon coating as an interstitial layer to prevent FIB milling artefacts and damage. Examples of FIB-induced damage in TEM lamellas. (A)
ACE600 stage after deposition of 35 nm of amorphous carbon. (B) Overview image (HAADF-STEM) of a mounted FIB lamella. (C) Overview image
(HAADF-STEM) to demonstrate the uniform thickness of the carbon protection layer. (D and E) Higher magnification images (HAADF-STEM) of the
sample, showing superior preservation of the surface atoms and layers. (Courtesy images Ricardo Evoagil, Jo Verbeeck, EMAT, University of
Antwerp; FIB sample prepared by Stijn Van den Broeck)
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